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Microsystems Laboratory

Microsystems laboratory
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Clean room

Zonas:

  • Class 100 photolithography area
  • Class 1000 chemical bath area
  • Class 1000 process, characterisation and encapsulation area.
  • Water ultrapurification system and deionised water.
  • Environmental waste control.

Photolithography equipment:

  • Ramgraber chemical bath with various tanks for cleaning samples and developing photo resin, with and without ultrasound. It has 2 spinners for the photo resin tank and for drying.
  • Karl Süss MA6/BA6 and EVG620 two sided alignment-exposure unit .

Process equipment:

  • ATV PEO-601 Dry or wet thermal oxidation furnace.
  • Harrick and Diener Pico plasma cleaning.
  • Pfeiffer Vacuum Classic 500 coating system with 4 Ferrotec 4” magnetrons.
  • Dimatix DMP-2800 ink-jet printer
  • Dr. Blade
  • Glove chamber with evaporator
  • Quantum dots synthesis chamber

Chemical process equipment

  • 2 Ramgraber general purpose chemical baths for cleaning and processing.
  • One Ramgraber KOH chemical bath.
  • Electrochemical shutdown system in KOH with AMMT potentiostat model SC.
  • AMMT PSB silicon porosification/electropolishing system.
  • Iko Fibrotools electrodeposit system

Dry etching equipment

  • Oxide dry etching system RIE Oxford Plasmalab 80.
  • DRIE Oxford Plasmalab 80 Silicon deep etching system.

Encapsulation

  • Karl Süss SB6 and EVG510 wafer level encapsulation machine (anodic bonding, eutectic, silicon-silicon)
  • DAD321 Disc Cutter.
  • Dr. Tresky 3002 die attach and flip-chip flexible machine.
  • Kulicke & Soffa 4524 (ball-wedge) and 4523 (wedge-wedge) interconnection machines.
  • Pull and shear tests with Daga 4000 system.

Characterisation

  • Quanta 200 electronic microscope with EDAX Genesis 2000 materials analysis.
  • LEICA DM LM 1000x magnification microscope.
  • Leica MZ 12.5 stereo microscope, with Leica DC200 Digital Camera and IM 1000 software.
  • Atos non-contact confocal profilometer.

Metricon Model 2010 Prism Coupler refraction index.

  • Sentech SE500 ellipsometer.
  • Jandel multi-position sheet resistance.
  • Optical equipment for testing in waveguides.
  • Climats Excal 5424-HE climatic chamber for testing temperature and humidity.
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